SEM/FIB Workstation: Helios NanoLab DualBeam 600 (FEI)
The Helios NanoLab™ Workstation
- nano-prototyping
- nano-machining
- nano-analysis
- advanced TEM sample preparation
For more information on using this instrument, please refer to our policies and rates.
Specifications
Electron optics
- Resolution: 0.9 nm @ 15 kV, 1.4 nm @ 1 kV
- Detection: in-lens SE and BSE
Ion optics
Sidewinder™ field emission focused ion beam optics with liquid Gallium ion emitter;
- Resolution: 5.0 nm @ 30 kV
- Detection: CDEM detector
Application
- Patterning: Simultaneous imaging and patterning with end-point detection through Real-Time Monitor
- AutoFIB
- Platinum Deposition
- Selective Carbon Mill
- Enhanced Etch
- TEM sample preparation
- AutoTEM G2; Omniprobe AutoProbe 200.2
Diagnostics
- EDS& EBSD
- Pegasus Package, EDAX