SEM/FIB Workstation: Helios NanoLab DualBeam 600 (FEI)

Helios Data

The Helios NanoLab™ Workstation

  • nano-prototyping
  • nano-machining
  • nano-analysis
  • advanced TEM sample preparation

For more information on using this instrument, please refer to our policies and rates.

Specifications

Electron optics

  • Resolution:  0.9 nm @ 15 kV, 1.4 nm @ 1 kV
  • Detection: in-lens SE and BSE

Ion optics 

Sidewinder™ field emission focused ion beam optics with liquid Gallium ion emitter; 

  • Resolution: 5.0 nm @ 30 kV
  • Detection: CDEM detector

Application

  • Patterning: Simultaneous imaging and patterning with  end-point detection through Real-Time Monitor
  • AutoFIB
  • Platinum Deposition
  • Selective Carbon Mill
  • Enhanced Etch
  • TEM sample preparation
  •  AutoTEM G2;  Omniprobe AutoProbe 200.2

Diagnostics

  • EDS& EBSD
  • Pegasus Package, EDAX